JPH0414512B2 - - Google Patents

Info

Publication number
JPH0414512B2
JPH0414512B2 JP57005942A JP594282A JPH0414512B2 JP H0414512 B2 JPH0414512 B2 JP H0414512B2 JP 57005942 A JP57005942 A JP 57005942A JP 594282 A JP594282 A JP 594282A JP H0414512 B2 JPH0414512 B2 JP H0414512B2
Authority
JP
Japan
Prior art keywords
strain gauge
semiconductor
temperature
strain
sensitivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57005942A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58123780A (ja
Inventor
Takashi Kugaya
Tsutomu Okayama
Michitaka Shimazoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57005942A priority Critical patent/JPS58123780A/ja
Publication of JPS58123780A publication Critical patent/JPS58123780A/ja
Publication of JPH0414512B2 publication Critical patent/JPH0414512B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP57005942A 1982-01-20 1982-01-20 半導体ストレインゲ−ジトランスジユ−サ Granted JPS58123780A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57005942A JPS58123780A (ja) 1982-01-20 1982-01-20 半導体ストレインゲ−ジトランスジユ−サ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57005942A JPS58123780A (ja) 1982-01-20 1982-01-20 半導体ストレインゲ−ジトランスジユ−サ

Publications (2)

Publication Number Publication Date
JPS58123780A JPS58123780A (ja) 1983-07-23
JPH0414512B2 true JPH0414512B2 (en]) 1992-03-13

Family

ID=11624948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57005942A Granted JPS58123780A (ja) 1982-01-20 1982-01-20 半導体ストレインゲ−ジトランスジユ−サ

Country Status (1)

Country Link
JP (1) JPS58123780A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6225228A (ja) * 1985-07-25 1987-02-03 Ngk Spark Plug Co Ltd 内燃機関の圧力センサ−
US5343755A (en) * 1993-05-05 1994-09-06 Rosemount Inc. Strain gage sensor with integral temperature signal
JP3900644B2 (ja) 1998-01-16 2007-04-04 株式会社デンソー 半導体圧力センサの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5453877A (en) * 1977-10-07 1979-04-27 Hitachi Ltd Temperature compensation circuit of semiconductor strain gauge
JPS5941134B2 (ja) * 1980-04-15 1984-10-04 富士電機株式会社 圧力変換器

Also Published As

Publication number Publication date
JPS58123780A (ja) 1983-07-23

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